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常見的電子混合氣體組分|紐瑞德特氣

文章出處:責(zé)任編輯:人氣:-發(fā)表時間:2020-04-14 15:10:00【

 電子工業(yè)用氣體統(tǒng)稱為電子氣。在大規(guī)模集成電路(LSI)、超大規(guī)模集成電路(VLSI)、半導(dǎo)體和電子器件生產(chǎn)與加工過程中,電子氣主要用于氣相外延生長、化學(xué)氣相淀積、摻雜(雜質(zhì)擴(kuò)散)、蝕刻、離子注入、濺射、退火、系統(tǒng)加壓、潔凈吹掃、吸氣覆蓋、氧化和還原等工藝。其中部分氣體直接作為半導(dǎo)體源,如硅源、硼源、磷源和CVD 源等等。

 
常見的幾種電子混合氣體
 
Oxygen in Tetrafluoromethane
 
4% O2/CF4
8% O2/CF4
17.5% O2/CF4
Standard Valve Outlet CGA580
Other DISS CGA connections are avaliable upon request.
Phosphine in Argon
 
1.0% PH3/Ar
2.0% PH3/Ar
5.0% PH3/Ar
10.0% PH3/Ar
15.0% PH3/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Helium
 
1.0% PH3/He
2.0% PH3/He
10.0% PH3/He
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Hydrogen
 
1.0% PH3/H2
5.0% PH3/H2
10.0% PH3/H2
15.0% PH3/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Phosphine in Nitrogen
 
1.0% PH3/N2
2.0% PH3/N2
3.0% PH3/N2
4.0% PH3/N2
5.0% PH3/N2
10.0% PH3/N2
15.0% PH3/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Argon
 
1.0% SiH4/Ar
2.0% SiH4/Ar
3.0% SiH4/Ar
4.0% SiH4/Ar
5.0% SiH4/Ar
10.0% SiH4/Ar
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Hydrogen
 
1.0% SiH4/H2
2.0% SiH4/H2
3.0% SiH4/H2
4.0% SiH4/H2
5.0% SiH4/H2
10.0% SiH4/H2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
Silane in Nitrogen
 
1.0% SiH4/N2
2.0% SiH4/N2
3.0% SiH4/N2
4.0% SiH4/H2
5.0% SiH4/N2
10.0% SiH4/N2
20.0% SiH4/N2
Standard Valve Outlet CGA350
Manual and pneumatic DISS CGA connections are avaliable upon request.
 
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此文關(guān)鍵字:特種氣體知識 氣體知識